Works with your instrument · SEM

Tools for the Scanning Electron Microscope

Retrofit or OEM integration into virtually any scanning electron microscope.

Nanoprobing
Top-down view of the PS8e Prober Shuttle, eight MM4 manipulators converging on a central chip.
PS8e

Prober Shuttle PS8e

A compact, fully integrated nanoprobing system — now encoded for automatic probe pre-alignment at the 3 nm node and beyond.

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SEM image of eight nanoprobe tips converging on a patterned chip surface, 200 nm scale bar.
PS8

Prober Shuttle PS8

High-precision in-situ electrical nanoprobing with up to eight ultra-flat MM4 manipulators — for advanced-node failure analysis.

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The PS4 Prober Shuttle hardware — a circular stage carrying four ultra-flat MM4 manipulators with copper and gold detail.
PS4

Prober Shuttle PS4

A compact two- or four-probe nanoprobing system for in-situ electrical characterization at advanced nodes.

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The NW4 platform — a load-lock-compatible base with space for up to four MM3A-EM micromanipulators arranged around a large substrate.
NW4

NW4

A load-lock platform hosting up to four MM3A-EM manipulators — nanoprobing and failure analysis on large substrates up to 120 × 120 mm.

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The ProbeWorkstation+ — multiple MM3A-EM micromanipulators arranged around a central sample on a long-range substage.
ProbeWorkstation+

ProbeWorkstation+

Up to eight manipulators, a roof-mounted prober and a 30 mm substage — a complete in-SEM probe station, installed or removed in 60 seconds.

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The Micro Heating and Cooling Stub mounted on a Prober Shuttle PS8.
MHCS-PS

Heating & Cooling Stage for PS8

A heated/cooled stub for the Prober Shuttle PS8 — regulate sample temperature from −20 °C to +150 °C during probing, water-cooling-free.

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Micromanipulators
The MM3E micromanipulator — a compact three-axis arm in machined aluminium, brass and copper with a fine probe tip.
MM3E

MM3E

An encoded, closed-loop micromanipulator — define parking and working positions and recall them at the click of a button.

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An array of MM3A-EM manipulators with magenta drive coils converging towards a central point.
MM3A-EM

MM3A-EM

The industry-standard spherical micromanipulator — the platform every Kleindiek plug-in tool attaches to, with 3000+ units in the field.

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Plug-in Tools
SEM image of the MGS2 micro-gripper approaching a cluster of microspheres, 5 µm scale bar.
MGS2

Micro Gripper MGS2

A two-jaw micro-gripper that picks up, holds and repositions micro-objects inside the electron microscope.

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The FMS-EM force-measurement plug-in on a Kleindiek MM3A-EM micromanipulator, its silicon force sensor visible as a small gold chip at the tip, fed by a fine cable.
FMS-EM

Force Measurement System FMS

Laser-free force measurement and nanoindentation in the SEM — resolve forces to 10 nN and identify materials by their resonance.

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The MTW-EM microtweezer plug-in on a Kleindiek micromanipulator, ending in fine piezo-driven gripper jaws.
MTW-EM

Microtweezer MTW

A piezo-driven microtweezer for pick-and-place — one jaw fixed, one jaw stepping in 0.25 nm increments across a 3 mm span.

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The RoTip rotational-axis plug-in on a Kleindiek micromanipulator, its cylindrical axis holding a long tungsten probe tip.
RoTip-EM

RoTip

A rotational-axis plug-in that adds a fourth degree of freedom — continuous 0.1° rotation for true FIB lathe milling, tomography and STEM.

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The LCMK-EM low-noise probe-tip holder on a Kleindiek MM3A-EM micromanipulator, with shielded triax cabling running to a fine tungsten probe tip.
LCMK-EM

Probe-Tip Holder LCMK

A low-noise, low-resistance probe-tip holder that turns a Kleindiek manipulator into a precision nanoprober — resolving currents down to 3 fA.

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The GIS-EM gas-injection plug-in on a Kleindiek micromanipulator, showing the heated precursor reservoir, fine heater wiring and the injection needle.
GIS-EM

Gas Injection System GIS

A gas-injection plug-in that meters precursors and gases into the SEM chamber in precise doses, through a proportional valve driven by a Nanomotor®.

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The MIS-EM microinjection plug-in on a Kleindiek MM3A-EM micromanipulator, its micro-valve fed by inlet tubing and ending in a fine glass injection pipette.
MIS-EM

Microinjection System MIS

A micro-valve plug-in for precise microinjection of liquids onto samples in the low-vacuum SEM, down to roughly 100 µm droplets.

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The MSU micro-soldering plug-in on a Kleindiek MM3A-EM micromanipulator, its heated tip wound with fine copper heating wire.
MSU-EM

Micro Soldering Unit MSU

A miniaturized, closed-loop soldering iron for the SEM — set a tip temperature and hold it, in air or in vacuum, for micro-scale joining.

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Substages
The ACT Anti-Curtaining Table — a compact machined-metal substage with a cylindrical drive at left and a tilted platform holding a round sample mount.
ACT

ACT

A four-axis Anti-Curtaining Table for true eucentric tilt during FIB cross-sectioning and TEM-slice prep.

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The E5AT stage — a stainless-steel five-axis substage with twin upright bearings cradling a tilting platform that carries a patterned sample chip.
E5AT

E5AT

A five-axis eucentric stage — unlimited rotation and ±90° tilt while keeping the region of interest centred, for ECCI, EBSD and tomography.

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The 6-Axis Alignment Stage — two three-axis stages stacked one above the other, a tall post-mounted upper stage on a wider lower frame.
6AA

6-Axis Alignment Stage

Two stacked three-axis stages for aligning two objects to each other — and the assembly to an external beam.

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The LT14030 — a large, low-profile brushed-metal linear stage with a nested square XY table at its centre and ribbon-cable wiring.
LT14030

LT14030

A 30 mm-travel encoded linear table with dual-encoder yaw compensation — an economical alternative to laser-interferometer stages.

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The LT6820 — a tiered linear stage with cross-roller XY slides and a four-post Z pedestal raising a square top plate.
LT6820

LT6820

A 20 mm closed-loop linear/Z table with 100 nm encoder repeatability for lithography, cell counting and failure analysis.

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The LT6620 — a stainless-steel linear stage with cross-roller XY slides and a four-post Z column supporting a square top plate.
LT6620

LT6620

The open-loop 20 mm linear/Z table — large-range, high-precision positioning where encoders aren't required.

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The LT3310 — a compact stainless-steel linear stage with a short four-post Z pedestal raising a small square top plate.
LT3310

LT3310

A compact 10 mm linear table for weight- and space-restricted nanomanipulation in SEM/FIB, UHV and at low temperature.

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The SFLT3310 — an ultra-thin, low-profile stainless-steel linear stage, a flat square slab with a nested cut-out table.
SFLT3310

SFLT3310

An ultra-low-profile 3.8 mm-tall piezo linear table — smooth XY motion in the tightest spaces, ideal paired with the Prober Shuttle.

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Add-on Tools
A strip of five current-contrast example images labelled EBIC, EBAC, RCI, EBIRCH and EBIV — false-colour defect maps overlaid on SEM views of semiconductor structures.
EBIC

EBIC Amplifier

A low-noise current amplifier that turns the electron beam into a defect-mapping tool — EBIC, EBAC, RCI, EBIRCH and EBIV from a single unit.

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The MHCS micro heating and cooling stage — a cylindrical aluminium stage on a round flanged base ringed with brass fixing screws.
MHCS

Micro Heating & Cooling Stage MHCS

A water-cooling-free micro heating and cooling stage — drive −60 °C to +125 °C temperature profiles on the sample, vibration-free.

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The MHS micro heating stage — a small cylindrical stage with a braided copper thermal strap, on a white background.
MHS

Micro Heating Stage MHS

A miniaturized heating stage with closed-loop control — up to 200 °C, or 450 °C with the MHS450 variant.

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The nanolathe — a machined aluminium rotational-axis unit with a vertical collet at the top holding a fine needle sample upright.
RT-LATHE

Nanolathe (RT-LATHE)

A stand-alone rotational axis for true FIB lathe milling and tomography — spin a region of interest concentrically under the beam.

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Three SpringTable force-measurement devices of different sizes, each machined in aluminium with a copper spring strip engraved with its spring constant (for example 11.5 N/m and 125 N/m).
STFMA

SpringTable & Force Measurement Analysis

A low-tech SpringTable that converts the SEM's own resolution into quantitative force–distance curves.

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An in-chamber view of two Kleindiek micromanipulators flanking a central sample pillar, with the SemCam camera module viewing from the upper right.
SemCam

SemCam

An in-chamber CCD camera that watches the probe approach from the side — land tips in under thirty seconds.

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Evidence

Research on the SEM

All publications
2022ACS Nano 16

Aligned Stacking of Nanopatterned 2D Materials for High-Resolution 3D Device Fabrication

Jonas Haas et al.

DOI 10.1021/acsnano.1c09122
2020Nature Communications 11

Mechanical cleaning of graphene using in situ electron microscopy

Peter Schweizer et al.

DOI 10.1038/s41467-020-15255-3
2009Physical Review B 80

Magnetic energies of single submicron permalloy rectangles determined via magnetotransport

André Kobs et al.

DOI 10.1103/PhysRevB.80.134415
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Interfacing solutions exist for most commercial microscopes — OEM-integrated or retrofit. Tell us your model and we'll confirm the mount.

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