Substages
Linear, rotation and multi-axis stages — including low-temperature variants — for accurate, reproducible sample positioning.

ACT
A four-axis Anti-Curtaining Table for true eucentric tilt during FIB cross-sectioning and TEM-slice prep.
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E5AT
A five-axis eucentric stage — unlimited rotation and ±90° tilt while keeping the region of interest centred, for ECCI, EBSD and tomography.
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6-Axis Alignment Stage
Two stacked three-axis stages for aligning two objects to each other — and the assembly to an external beam.
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LT14030
A 30 mm-travel encoded linear table with dual-encoder yaw compensation — an economical alternative to laser-interferometer stages.
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LT6820
A 20 mm closed-loop linear/Z table with 100 nm encoder repeatability for lithography, cell counting and failure analysis.
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LT6620
The open-loop 20 mm linear/Z table — large-range, high-precision positioning where encoders aren't required.
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LT3310
A compact 10 mm linear table for weight- and space-restricted nanomanipulation in SEM/FIB, UHV and at low temperature.
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SFLT3310
An ultra-low-profile 3.8 mm-tall piezo linear table — smooth XY motion in the tightest spaces, ideal paired with the Prober Shuttle.
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Tell us your sample and your microscope — we’ll walk you through the workflow and route you to the right regional team.